publications

Journal Papers

Books

GhodssiR. Ghodssi and P. Y. Lin, Co-editors, "MEMS Materials and Processes Handbook", Springer, March 2011, (ISBN 978-0-387-47316-1).

S. A. Tadigadapa, R. Ghodssi, and A. K. Henning, "MEMS/MOEMS Components and Their Applications IV", Microelectromechanical Systems, SPIE 2007 (ISBN 0819465771).



Journal Publications




Special Proceedings

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