MEMS Materials and Processes Handbook is an exhaustive design reference for researchers

The new MEMS Materials and Processes Handbook (ISBN 978-0-387-47316-1) is an exhaustive design reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. It will be valuable for seasoned researchers and engineers as well as students and other newcomers working in MEMS and materials processing. The handbook is co-edited by Professor and ISR Director Reza Ghodssi (ECE/ISR); and Pinyen Lin, Chief Technologist and VP of Business Development, Touch Micro-System Technology Corp. Taoyuan, Taiwan. It features 35 international contributing authors who are MEMS leaders in academic, industrial and government laboratory settings.